CANON 機台零件服務
CANON Spare Parts for Sale
Parts for:FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX5 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper, FPA-5000 ES3 DUV Scanner, FPA5000 ES2 DUV Scanner...(Please confirm the actual applicable Model by yourself)
In Front Serial number & Parts name
1. BG3-3306 2. BG4-5459 3. BG4-6458 4. BG4-6460 5. BG4-6463 6. BG4-6633 7. BG4-8224 8. BG4-8591 9. BG4-8592 10. BG4-8615 11. BG4-8616 12. BG4-8700 13. BG4-8705 14. BG4-8815 15. BG4-3501 16. BG4-3502 17. 7007 Fold Mirror Zygo 18. Accelerometer ACC-X 19. Accelerometer ACC-Y 20. C-Oil Supply Module 21. Door 22. HP Key Board 23. JCC Keyboard 24. Linear Sensor FUJI PE-LA10D 25. Mirror (triangle) 26. Mirror Bar(Long) 27. Mirror Bar(Short) 28. Pressure Switch PSA4-102VP 6ea/set 29. Pressure Transmitter PTA427C 30. Reflection Mirror X 31. Reflection Mirror Y 32. Reflection Mirror θ 33. Robot Finger 34. SERVO DRIVER DBAP-FA-Z 35. ULEX23 C0022 36. Zygo 7024Plane Mirror Zygo 7003A Retroreflector 37. Zygo 7024A Plane Mirror Zygo 7003ARetroreflector 38. EX019(962502-a b c) 39. Power supply 40. BG4-6456 41. BG4-6457 42. BG4-8680 43. BG4-6755、BG4-9028 44. Laser Module E021B 45. Laser Module E021C 46. Door 47. BG4-8603 CAMERA 48. BG3 7525 49. Power supply BH5-3523 |
Back Side Serial number & Parts name
1. BG8-3537、BG3-2389、BG3-3696 2. BG4-9780 3. BG4-6458、BG4-6663 4. BG8-2669 5. BG4-9005、BG8-2667 6. 7. BG8-3326、BG3-2090 8. BG4-8976、BG8-3356 9. BG8-3357、BG3-2345 10. BG4-6591、BG4-6598 11. 12. BG8-3368 13. BG4-8073 Oil Supply Module 14. BG4-8998、BG8-3380 CDIF2 15. BG9-3793、BG8-3363、BG8-2253 16. BG8-2254 17. 9621 18. 19. 20. 21. 22. 23. 24. BG4-8628 25. E020 26. 27. 28. 29. 30. 9622 31. 9622 32. 9622 33. 34. 24V 300W 500 PPR 35. 960712-A、960712-B、4308 36. 9633 37. 9622 38. 39. Prestige ext 40. 41. BG4-9011、BG8-2670 42. BG8-3369 43. BG8-2672 44. BG4-6583 45. BG4-6583 46. 47. Texas Instruments MC-780P 48. 49. Fujitsu Access |